External N2 Tool Load Port

Purging N2 or XCDA air to reduce AMC, humidity, and oxygen inside the FOUP, helps our customers to achieve better product quality and effectively control in product Q-time. Our retrofit docking plates cover 95% of Load port types of Industry used. (TDK、Sinfonia、Rorze、Brooks、Hirata etc.) Apply on both Entegris and Shin-Etsu FOUP types. Purge with fixed flow. Individual air control module can be separated and installed. External controller is easy to install and maintain, shorten down time of installation and trouble shooting.