FOUP/ FOSB N2 Purge System

Meet the needs of Cassette, FOUP and FOSB multi-usage of air purging, we solve the problem of Fab that using multi types of FOUP. The goal is to effectively improve wafer yield by keeping the container in low humidity and oxygen during transportation.
The only purge plate is suitable for FOSB, Entegris and Shin-Etsu FOUP at a time.
Triple modes for purging, operator manual- purge, OHT loading auto-purge or both.

Product Specification

Dimension: L-70 W-63 H-140 cm
Weight: 80 KG
Standard Spec: E84 Communication, Mass Flow Control
Quality control option: Humidity sensor, Oxygen meter
ID system option: RFID, Barcode

Product Highlights

Customized purge plate for FOSB, Entegris and Shin-Etsu FOUP.
Triple modes to purge, manual, auto and both.
Identify different carriers by Info pad sensors (FOUP/ FOSB).
Barcode or RFID FOUP ID identified system.
Fixed flow or Mass flow control (MFC) on purging air.
Anti-statistic Silicone material nozzles, the hydrophobic coating creates a barrier against dirt. Repel dust, particle, and easier to clean.
Multiple parameter setting for purge volume and time, process program ID (PPID) creatable.
Support SEMI E84 communication protocol.
Equips with 7” full-color Human Machine Interface (HMI).
Real-time display for equipment status, automatically produce charts of flow, O2, and humidity value for User to understand the status by timeline.