N2 Stocker Retrofit

Retrofit FOUP Stocker load port to N2/ XCDA purge port system. External Controller can be separated and install in the spare space. All capacities in Stocker are retrofitted. FOUP will remain in low humidity and oxygen to achieve better yield.

Product Specification

Dimension: Customized
Retrofit quantity: All stocker storages are able to retrofit.

Product Highlights

Retrofit all Stocker capacities.
Modular load port design, easy to install and maintain.
Anchor point remains in same position, won’t affect robot accuracy.
Fixed flow or Mass flow control (MFC) on purging air.
Anti-statistic Silicone material nozzles, the hydrophobic coating creates a barrier against dirt. Repel dust, particle, and easier to clean.
Real-time display for STK status, automatically produce charts of flow, O2, and humidity sensor value for User to understand the status by timeline.