• Inline Stocker Gas Purge System
  • Inline Stocker Gas Purge System
  • Inline Stocker Gas Purge System

Inline Stocker Gas Purge System

This is the customized system for 4 or 2 embedding N2 Purge stations inside the Stocker. Customized dimension and Stocker cover to fit the stocker reserved vacancy. The purpose of this application helps FOUP/ FOSB remain in low humidity and oxygen to achieve better yield.
Product Specification
  • Dimension: Customized
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Product Specification

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