Inline Stocker Gas Purge System
This is the customized system for 4 or 2 embedding N2 Purge stations inside the Stocker.
Customized dimension and Stocker cover to fit the stocker reserved vacancy. The purpose of this application helps FOUP/ FOSB remain in low humidity and oxygen to achieve better yield.
Product Specification
- Dimension: Customized
Product Specification
- Dimension: Customized